Multi-step etching of three-dimensional sub-millimeter curved silicon microstructures with in-plane principal axis
Sabry, Yasser M., Khalil, Diaa, Saadany, Bassam, Bourouina, TarikVolume:
114
Langue:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.10.001
Date:
February, 2014
Fichier:
PDF, 1018 KB
english, 2014