A Ku-band Dual-SPDT RF-MEMS Switch by Double-Side SOI Bulk Micromachining
Yamane, Daisuke, Sun, Winston, Seita, Harunobu, Kawasaki, Shigeo, Fujita, Hiroyuki, Toshiyoshi, HiroshiVolume:
20
Langue:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2011.2162490
Date:
October, 2011
Fichier:
PDF, 1.59 MB
english, 2011