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[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - Heterogeneous integration technology for combination of different wafer sizes using an expandable handle substrate
Forsberg, F., Roxhed, N., Stemme, G., Niklaus, F.Année:
2011
Langue:
english
DOI:
10.1109/MEMSYS.2011.5734413
Fichier:
PDF, 2.17 MB
english, 2011