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LIF measurements of metallic sputtering during the deposition of a-C:H and a-C/B:H films
D. Tafalla, E. de la Cal, F.L. Tabarés, C. MaffiotteVolume:
220-222
Année:
1995
Langue:
english
Pages:
5
DOI:
10.1016/0022-3115(94)00607-5
Fichier:
PDF, 398 KB
english, 1995