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Nanopatterning of diblock copolymer directed self-assembly lithography with wet development
Muramatsu, MakotoVolume:
11
Langue:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.11.3.031305
Date:
July, 2012
Fichier:
PDF, 1.69 MB
english, 2012