Comparison of methods to determine bandgaps of ultrathin HfO2 films using spectroscopic ellipsometry
Di, Ming, Bersch, Eric, Diebold, Alain C., Consiglio, Steven, Clark, Robert D., Leusink, Gert J., Kaack, TorstenVolume:
29
Année:
2011
Langue:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3597838
Fichier:
PDF, 654 KB
english, 2011