[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Enhancement of temperature stability via constant-structural-resistance control for MEMS resonators
Chen, Cheng-Chi, Yu, Huan-Tse, Li, Guan-Hsien, Li, Sheng-ShianAnnée:
2013
Langue:
english
DOI:
10.1109/MEMSYS.2013.6474355
Fichier:
PDF, 1.68 MB
english, 2013