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[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Heated atomic force microscope cantilevers with wear-resistant ultrananocrystalline diamond tips
Kim, H. J., Moldovan, N., Felts, J. R., Somnath, S., Dai, Z., Jacobs, T. D. B., Carpick, R. W., Carlisle, J. A., King, W. P.Année:
2013
DOI:
10.1109/MEMSYS.2013.6474223
Fichier:
PDF, 318 KB
2013