[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - MEMS sensor array platform integrated with CMOS based optical readout
Erarslan, Refik Burak, Lulec, Sevil Zeynep, Adiyan, Ulas, Olcer, Selim, Temiz, Yuksel, Leblebici, Yusuf, Torun, Hamdi, Urey, HakanAnnée:
2013
Langue:
english
DOI:
10.1109/MEMSYS.2013.6474207
Fichier:
PDF, 3.80 MB
english, 2013