Electrochemical mechanical micromachining based on confined etchant layer technique
Yuan, Ye, Han, Lianhuan, Zhang, Jie, Jia, Jingchun, Zhao, Xuesen, Cao, Yongzhi, Hu, Zhenjiang, Yan, Yongda, Dong, Shen, Tian, Zhong-Qun, Tian, Zhao-Wu, Zhan, DongpingVolume:
164
Année:
2013
Langue:
english
Journal:
Faraday Discussions
DOI:
10.1039/C3FD00008G
Fichier:
PDF, 898 KB
english, 2013