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Conformal hydrophobic coatings prepared using atomic layer deposition seed layers and non-chlorinated hydrophobic precursors
Herrmann, Cari F, DelRio, Frank W, Bright, Victor M, George, Steven MVolume:
15
Langue:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/15/5/013
Date:
May, 2005
Fichier:
PDF, 806 KB
english, 2005