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High-Q micromechanical resonators in a two-dimensional phononic crystal slab
Mohammadi, Saeed, Eftekhar, Ali Asghar, Hunt, William D., Adibi, AliVolume:
94
Année:
2009
Langue:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.3078284
Fichier:
PDF, 541 KB
english, 2009