Experimental kinetic study of the chemical vapour deposition of SiC-based ceramics from CH3SiCl3H2 gas precursor
F. Loumagne, F. Langlais, R. NaslainVolume:
155
Année:
1995
Langue:
english
Pages:
7
DOI:
10.1016/0022-0248(95)00180-8
Fichier:
PDF, 498 KB
english, 1995