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The dependence of bulk defects on the axial temperature gradient of silicon crystals during Czochralski growth
Wilfried von Ammon, Erich Dornberger, Hans Oelkrug, Herbert WeidnerVolume:
151
Année:
1995
Langue:
english
Pages:
5
DOI:
10.1016/0022-0248(95)00063-1
Fichier:
PDF, 407 KB
english, 1995