Improvement of gas-switching abruptness for atmospheric pressure organometallic vapor phase epitaxy
Farid Agahi, Charles R. Lutz Jr., Kei May LauVolume:
139
Année:
1994
Langue:
english
Pages:
7
DOI:
10.1016/0022-0248(94)90186-4
Fichier:
PDF, 547 KB
english, 1994