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Micro/nano-patterned metal transfer using UV-curable polymers
Hsu, S-H, Su, H-C, Chung, Y-CVolume:
22
Langue:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/22/3/035008
Date:
March, 2012
Fichier:
PDF, 1.83 MB
english, 2012