FowlerâNordheim analysis of oxides on 4H-SiC substrates using noncontact metrology
Oborina, Elena I., Benjamin, Helen N., Hoff, Andrew M.Volume:
106
Année:
2009
Langue:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3245323
Fichier:
PDF, 561 KB
english, 2009