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[IEEE 56th Electronic Components and Technology Conference 2006 - San Diego, CA (May 30 - June 2, 2006)] 56th Electronic Components and Technology Conference 2006 - Low Electrical Resistance Silicon Through Vias: Technology and Characterization
Henry, D., Belhachemi, D., Souriau, J.-C., Brunet-Manquat, C., Puget, C., Ponthenier, G., Vallejo, J.L., Lecouvey, C., Sillon, N.Année:
2006
Langue:
english
DOI:
10.1109/ECTC.2006.1645834
Fichier:
PDF, 1.99 MB
english, 2006