SPIE Proceedings [SPIE Photonics Asia 2004 - Beijing, China (Monday 8 November 2004)] MEMS/MOEMS Technologies and Applications II - Analysis on the optical MEMS pressure sensors based on circular multilayer diaphragm
Li, Ming, Wang, Ming, Wang, Tinting, Rong, Hua, Chen, Xuxing, Ma, Zhichun, Jin, Guofan, Chen, XuyuanVolume:
5641
Année:
2004
Langue:
english
DOI:
10.1117/12.573685
Fichier:
PDF, 107 KB
english, 2004