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Photoelectrochemical etching of uniform macropore array on full 5-inch silicon wafers
Zhigang, Zhao, Jinchuan, Guo, Yaohu, Lei, Hanben, NiuVolume:
31
Langue:
english
Journal:
Journal of Semiconductors
DOI:
10.1088/1674-4926/31/7/076001
Date:
July, 2010
Fichier:
PDF, 407 KB
english, 2010