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SPIE Proceedings [SPIE Microelectronic and MEMS Technologies - Edinburgh, United Kingdom (Wednesday 30 May 2001)] MEMS Design, Fabrication, Characterization, and Packaging - Characterization and optimization of deep dry etching for MEMS applications
Rickard, Alexandra L., McNie, Mark E., Behringer, Uwe F. W., Uttamchandani, Deepak G.Volume:
4407
Année:
2001
Langue:
english
DOI:
10.1117/12.425287
Fichier:
PDF, 490 KB
english, 2001