SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - Microgalvanic nickel pulse plating process for the production of thermal actuators
Hansal, W., Steiner, H., Mann, R., Halmdienst, M., Schalko, J., Keplinger, F., Schmid, Ulrich, Sánchez de Rojas Aldavero, José Luis, Leester-Schaedel, MonikaVolume:
8763
Année:
2013
Langue:
english
DOI:
10.1117/12.2018001
Fichier:
PDF, 704 KB
english, 2013