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Fabrication and Evaluation of Highly Oriented Ta 2 O 5 Piezoelectric Thin Films Prepared by Radio Frequency Magnetron Sputtering
Kakio, Shoji, Mitsui, Takeshi, Tsuchiya, Akinori, Nakagawa, YasuhikoVolume:
49
Langue:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.49.07HB06
Date:
July, 2010
Fichier:
PDF, 297 KB
english, 2010