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SPIE Proceedings [SPIE Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS - Paris, France (Tuesday 9 May 2000)] Design, Test, Integration, and Packaging of MEMS/MOEMS - Coupling of length scales in MEMS modeling: the atomic limit of finite elements
Rudd III, Robert E., Courtois, Bernard, Crary, Selden B., Gabriel, Kaigham J., Karam, Jean Michel, Markus, Karen W., Tay, Andrew A. O.Volume:
4019
Année:
2000
Langue:
english
DOI:
10.1117/12.382286
Fichier:
PDF, 407 KB
english, 2000