Highly compliant static microcantilevers fabricated in gold nanocomposite materials
Nelson-Fitzpatrick, N, Evoy, SVolume:
21
Langue:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/21/11/115022
Date:
November, 2011
Fichier:
PDF, 745 KB
english, 2011