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Fourier transform infrared spectroscopy of annealed silicon-rich silicon nitride thin films
Scardera, G., Puzzer, T., Conibeer, G., Green, M. A.Volume:
104
Année:
2008
Langue:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3021158
Fichier:
PDF, 895 KB
english, 2008