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Molecular dynamics simulations of mechanical deformation of amorphous silicon dioxide during chemicalâmechanical polishing
Chagarov, Evgueni, Adams, James B.Volume:
94
Année:
2003
Langue:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1602551
Fichier:
PDF, 923 KB
english, 2003