Three-Dimensional Spherical Shell Resonator Gyroscope Fabricated Using Wafer-Scale Glassblowing
Zotov, Sergei A., Trusov, Alexander A., Shkel, Andrei M.Volume:
21
Langue:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2012.2189364
Date:
June, 2012
Fichier:
PDF, 517 KB
english, 2012