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SPIE Proceedings [SPIE Photonics Asia 2007 - Beijing, China (Sunday 11 November 2007)] MEMS/MOEMS Technologies and Applications III - Charge accumulation in composite dielectric layers in capacitive RF MEMS switches
Zhan, Linxian, San, Haisheng, Li, Gang, Xu, Peng, Chen, Xuyuan, Chiao, Jung-Chih, Chen, Xuyuan, Zhou, Zhaoying, Li, XinxinVolume:
6836
Année:
2007
Langue:
english
Pages:
1
DOI:
10.1117/12.756133
Fichier:
PDF, 773 KB
english, 2007