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[IEEE 2009 IEEE International Interconnect Technology Conference - IITC - Sapporo, Japan (2009.06.1-2009.06.3)] 2009 IEEE International Interconnect Technology Conference - Low-k interconnect stack with a novel self-aligned via patterning process for 32nm high volume manufacturing
Brain, R., Agrawal, S., Becher, D., Bigwood, R., Buehler, M., Chikarmane, V., Childs, M., Choi, J., Daviess, S., Ganpule, C., He, J., Hentges, P., Jin, I., Klopcic, S., Malyavantham, G., McFadden, B.,Année:
2009
Langue:
english
Pages:
3
DOI:
10.1109/IITC.2009.5090400
Fichier:
PDF, 283 KB
english, 2009