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[IEEE 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Kyoto, Japan (2012.03.5-2012.03.8)] 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - A research of the bandwidth of a mode-matching MEMS vibratory gyroscope
He, Chunhua, Zhao, Qiancheng, Cui, Jian, Yang, Zhenchuan, Yan, GuizhenAnnée:
2012
Langue:
english
DOI:
10.1109/NEMS.2012.6196880
Fichier:
PDF, 1.64 MB
english, 2012