Atmospheric pressure methane–hydrogen dc micro-glow discharge for thin film deposition
Farouk, T, Farouk, B, Gutsol, A, Fridman, AVolume:
41
Langue:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/41/17/175202
Date:
September, 2008
Fichier:
PDF, 2.02 MB
english, 2008