SPIE Proceedings [SPIE Scanning Microscopy 2010 - Monterey, California (Monday 17 May 2010)] Scanning Microscopy 2010 - Comprehensive simulation of SEM images taking into account local and global electromagnetic fields
Babin, Sergey, Borisov, Sergey S., Ito, Hiroyuki, Ivanchikov, Andrei, Matison, Dmitri, Militsin, Vladimir, Suzuki, Makoto, Postek, Michael T., Newbury, Dale E., Platek, S. Frank, Joy, David C.Volume:
7729
Année:
2010
Langue:
english
DOI:
10.1117/12.859951
Fichier:
PDF, 1.88 MB
english, 2010