Optical endpoint detection for plasma reduction of graphene oxide
Kim, MaengJun, Kahng, Yung Ho, Kim, Yong Jae, kumar, T. Prem, Park, KwangMook, Lee, Kwanghee, Jang, Jae-HyungVolume:
3
Année:
2013
Langue:
english
Journal:
AIP Advances
DOI:
10.1063/1.4795240
Fichier:
PDF, 994 KB
english, 2013