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Two-Color Single-Photon Photoinitiation and Photoinhibition for Subdiffraction Photolithography
Scott, T. F., Kowalski, B. A., Sullivan, A. C., Bowman, C. N., McLeod, R. R.Volume:
324
Langue:
english
Journal:
Science
DOI:
10.1126/science.1167610
Date:
May, 2009
Fichier:
PDF, 133 KB
english, 2009