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100% Fill-Factor Aspheric Microlens Arrays (AMLA) With Sub-20-nm Precision
Wu, D., Chen, Q.-D., Niu, L.-G., Jiao, J., Xia, H., Song, J.-F., Sun, H.-B.Volume:
21
Année:
2009
Langue:
english
DOI:
10.1109/lpt.2009.2029346
Fichier:
PDF, 765 KB
english, 2009