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Preliminary Study on Chemical Figuring and Finishing of Sintered SiC Substrate Using Atmospheric Pressure Plasma
K. Yamamura, Y. Yamamoto, H. DengVolume:
3
Année:
2012
Langue:
english
DOI:
10.1016/j.procir.2012.07.058
Fichier:
PDF, 653 KB
english, 2012