Fabrication of SiGe quantum devices by electron-beam induced damage
Joseph M. Ryan, Alec N. Broers, Douglas J. Paul, Michael Pepper, Terry E. Whall, Juan M. Fernández, Bruce A. JoyceVolume:
21
Année:
1997
Langue:
english
Pages:
8
DOI:
10.1006/spmi.1996.0137
Fichier:
PDF, 285 KB
english, 1997