Microstructured silicon membrane with soft suspension beams for a high performance MEMS microspeaker
Iman Shahosseini, Elie Lefeuvre, Emile Martincic, Marion Woytasik, Johan Moulin, Souhil Megherbi, Romain Ravaud, Guy LemarquandVolume:
18
Langue:
english
DOI:
10.1007/s00542-012-1477-1
Date:
November, 2012
Fichier:
PDF, 636 KB
english, 2012