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An Electrostatically Actuated Stacked-Electrode MEMS Relay With a Levering and Torsional Spring for Power Applications
Song, Yong-Ha, Han, Chang-Hoon, Kim, Min-Wu, Lee, Jeong Oen, Yoon, Jun-BoVolume:
21
Langue:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2012.2198046
Date:
October, 2012
Fichier:
PDF, 1.01 MB
english, 2012