Optical characterization of polysilazane based silica thin films on silicon substrates
Ricci, Pier Carlo, Gulleri, Gianluca, Fumagalli, Francesco, Carbonaro, Carlo Maria, Corpino, RiccardoVolume:
265
Langue:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2012.11.030
Date:
January, 2013
Fichier:
PDF, 662 KB
english, 2013