Global Modeling of Magnetized Capacitive Discharges
Carter, Mark D., Hoffman, Dan, Shannon, Steve, Ryan, Philip M., Buchberger, D.Volume:
35
Langue:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/tps.2007.906124
Date:
October, 2007
Fichier:
PDF, 424 KB
english, 2007