Etchant Anisotropy Controls the Step Bunching Instability in KOH Etching of Silicon
Garcia, Simon P., Bao, Hailing, Hines, Melissa A.Volume:
93
Langue:
english
Journal:
Physical Review Letters
DOI:
10.1103/physrevlett.93.166102
Date:
October, 2004
Fichier:
PDF, 725 KB
english, 2004