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Surface passivation of AlN/GaN MOS-HEMTs using ultra-thin Al2O3 formed by thermal oxidation of evaporated aluminium
Taking, S., Banerjee, A., Zhou, H., Li, X., Khokhar, A.Z., Oxland, R., McGregor, I., Bentley, S., Rahman, F., Thayne, I., Dabiran, A.M., Wowchak, A.M., Cui, B., Wasige, E.Volume:
46
Année:
2010
Langue:
english
Journal:
Electronics Letters
DOI:
10.1049/el.2010.2781
Fichier:
PDF, 208 KB
english, 2010