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Anisotropy of the electron component in a cylindrical magnetron discharge. II. Application to real magnetron discharge
Porokhova, I. A., Golubovskii, Yu. B., Behnke, J. F.Volume:
71
Langue:
english
Journal:
Physical Review E
DOI:
10.1103/physreve.71.066407
Date:
June, 2005
Fichier:
PDF, 237 KB
english, 2005