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[IEEE 2009 IEEE Sensors - Christchurch, New Zealand (2009.10.25-2009.10.28)] 2009 IEEE Sensors - Impact of sacrificial layer type on thin-film metal residual stress
Garg, Anurag, Small, Joshua, Liu, Xiaoguang, Mahapatro, Ajit K, Peroulis, DimitriosAnnée:
2009
Langue:
english
DOI:
10.1109/icsens.2009.5398591
Fichier:
PDF, 1.19 MB
english, 2009