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Poly(divinylsiloxyethylene glycol) — synthesis and photoresist characteristics
Hidetoshi Aoki, Takashi Tokuda, Yukio Nagasaki, Masao KatoVolume:
18
Année:
1997
Langue:
english
Pages:
6
DOI:
10.1002/marc.1997.030180105
Fichier:
PDF, 370 KB
english, 1997