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The hydrogen confinement and pipe diffusion in a-Si:H/a-Si3N4:H multilayer
Shuichi Nonomura, Masuyuki Ohta, Hisataka Suzuki, Takahiro Muraki, Shinji Kusakabe, Shoji NittaVolume:
137-138
Année:
1991
Langue:
english
DOI:
10.1016/s0022-3093(05)80324-2
Fichier:
PDF, 263 KB
english, 1991