Effect of reactive sputtered SiOx passivation layer on the stability of InGaZnO thin film transistors
Jun Li, Fan Zhou, Hua-Ping Lin, Wen-Qing Zhu, Jian-Hua Zhang, Xue-Yin Jiang, Zhi-Lin ZhangVolume:
86
Année:
2012
Langue:
english
DOI:
10.1016/j.vacuum.2012.04.009
Fichier:
PDF, 541 KB
english, 2012