Thermodynamic study on co-deposition of ZrB2–SiC from ZrCl4–BCl3–CH3SiCl3–H2–Ar system
Juanli Deng, Laifei Cheng, Guopeng Zheng, Kehe Su, Litong ZhangVolume:
520
Année:
2012
Langue:
english
DOI:
10.1016/j.tsf.2012.07.105
Fichier:
PDF, 728 KB
english, 2012